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Freescale Semiconductor Technical Data
MPXM2202 Rev 2, 09/2005
200 kPa On-Chip Temperature Compensated and Calibrated Silicon Pressure Sensors
The MPXM2202 device is a silicon piezoresistive pressure sensors providing a highly accurate and linear voltage output directly proportional to the applied pressure. The sensor is a single, monolithic silicon diaphragm with the strain gauge and a thin-film resistor network integrated on-chip. The chip is laser trimmed for precise span and offset calibration and temperature compensation. Features * * * * Temperature Compensated Over 0C to + 85C Available in Easy-to-Use Tape and Reel Ratiometric to Supply Voltage Gauge Ported and Non Ported Options
MPXM2202 SERIES
COMPENSATED AND CALIBRATED PRESSURE SENSOR 0 TO 200 kPA (0 TO 29 psi) 40 mV FULL SCALE SPAN (TYPICAL)
MPAK PACKAGE
Typical Applications * * * * * * * Pump/Motor Controllers Robotics Level Indicators Medical Diagnostics Pressure Switching Barometers Altimeters ORDERING INFORMATION
Device Type Nonported Options Absolute, Element Only Absolute, Element Only Absolute, Element Only Absolute, Element Only Ported Case No. MPX Series Order No. Packing Options Rails Device Marking MPXM2202D 1 2 1320 MPXM2202DT1 1320 MPXM2202A 1320 MPXM2202AT1 Tape & Reel MPXM2202D Rails MPXM2202A MPXM2202D/A CASE 1320-02
MPXM2202GS/AS CASE 1320A-02
PIN NUMBER
GND +VOUT 3 4 VS -VOUT
1320 MPXM2202D
Tape & Reel MPXM2202A Rails MPXM2202G
Absolute, Axial 1320A MPXM2202GS Port Absolute, Axial 1320A MPXM2202GST1 Port Absolute, Axial 1320A MPXM2202AS Port Absolute, Axial 1320A MPXM2202AST1 Port
Tape & Reel MPXM2202G Rails MPXM2202A
Tape & Reel MPXM2202A
(c) Freescale Semiconductor, Inc., 2005. All rights reserved.
Figure 1 shows a block diagram of the internal circuitry on the stand-alone pressure sensor chip.
VS
3 Thin Film Temperature Compensation and Calibration Circuitry 1 GND
X-ducer Sensing Element
2
VOUT+
4V OUT-
Figure 1. Temperature Compensated Pressure Sensor Schematic
VOLTAGE OUTPUT VERSUS APPLIED DIFFERENTIAL PRESSURE The differential voltage output of the sensor is directly proportional to the differential pressure applied. Table 1. Maximum Ratings(1)
Rating Maximum Pressure Storage Temperature Operating Temperature
The output voltage of the differential or gauge sensor increases with increasing pressure applied to the pressure side relative to the vacuum side. Similarly, output voltage increases as increasing vacuum is applied to the vacuum side relative to the pressure side.
Symbol Pmax Tstg TA
Value 400 -40 to +125 -40 to +125
Unit kPa C C
1. Exposure beyond the specified limits may cause permanent damage or degradation to the device.
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Table 2. Operating Characteristics (VS = 10 Vdc, TA = 25C.)
Characteristic Pressure Range(1) Supply Voltage(2) Symbol POP VS IO VFSS MPXM2202D/G Series MPXM2202A Series VOFF V/P MPXM2202D/G Series MPXM2202A Series -- -- -- -- TCVFSS TCVOFF ZIN ZOUT (10% to 90%) tR -- -- Min 0 -- -- 38.5 -1.0 -2.0 -- -0.6 -1.0 -- -- -2.0 -1.0 1000 1400 -- -- -- Typ -- 10 6.0 40 -- -- 0.2 -- -- 0.1 0.5 -- -- -- -- 1.0 20 0.5 Max 200 16 -- 41.5 1.0 2.0 -- 0.4 1.0 -- -- 2.0 1.0 2500 3000 -- -- -- Unit kPa Vdc mAdc mV mV mV/kPa %VFSS %VFSS %VFSS %VFSS mV ms ms %VFSS
Supply Current Full Scale Span(3) Offset(4) Sensitivity Linearity(5) Pressure Hysteresis(5) (0 to 100 kPa) Temperature Hysteresis(5) (-40C to +125C) Temperature Effect on Full Scale Temperature Effect on Offset Input Impedance Output Impedance Response Warm-Up Offset Stability(7) 1. 1.0 kPa (kiloPascal) equals 0.145 psi. Time(6)
(5)
Span(5)
2. Device is ratiometric within this specified excitation range. Operating the device above the specified excitation range may induce additional error due to device self-heating. 3. Full Scale Span (VFSS) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the minimum rated pressure. 4. Offset (Voff) is defined as the output voltage at the minimum rated pressure. 5. Accuracy (error budget) consists of the following: * Linearity: * * * * Output deviation from a straight line relationship with pressure, using end point method, over the specified pressure range. Pressure Hysteresis: Output deviation at any pressure within the specified range, when this pressure is cycled to and from the minimum or maximum rated pressure, at 25C. Temperature Hysteresis: Output deviation at any temperature within the operating temperature range, after the temperature is cycled to and from the minimum or maximum operating temperature points, with zero differential pressure applied. TcSpan: Output deviation at full rated pressure over the temperature range of 0 to 85C, relative to 25C. TcOffset: Output deviation with minimum rated pressure applied, over the temperature range of 0 to 85C, relative to 25C.
6. Response Time is defined as the time for the incremental change in the output to go from 10% to 90% of its final value when subjected to a specified step change in pressure. 7. Offset stability is the product's output deviation when subjected to 1000 hours of Pulsed Pressure, Temperature Cycling with Bias Test.
MPXM2202 Sensors Freescale Semiconductor 3
LINEARITY Linearity refers to how well a transducer's output follows the equation: VOUT = VOFF + sensitivity x P over the operating pressure range. There are two basic methods for calculating nonlinearity: (1) end point straight line fit (see Figure 2) or (2) a least squares best line fit. While a least squares fit gives
the "best case" linearity error (lower numerical value), the calculations required are burdensome. Conversely, an end point fit will give the "worst case" error (often more desirable in error budget calculations) and the calculations are more straightforward for the user. The specified pressure sensor linearities are based on the end point straight line method measured at the midrange pressure.
Least Squares Fit Exaggerated Performance Curve Relative Voltage Output Least Square Deviation
Least Square Deviation Straight Line Deviation
End Point Straight Line Fit
Offset 0 50 Pressure(% Fullscale) 100
Figure 2. Linearity Specification Comparison ON-CHIP TEMPERATURE COMPENSATION AND CALIBRATION Figure 3 shows the minimum, maximum and typical output characteristics of the MPXM2202 series at 25C. The output is directly proportional to the differential pressure and is essentially a straight line. A silicone gel isolates the die surface and wire bonds from the environment, while allowing the pressure signal to be transmitted to the silicon diaphragm.
40 35 Output (mVdc) 30 25 20 15 10 5 0 -5 0
VS = 10 Vdc TA = 25C TYP MAX Span Range (TYP) MIN
kPa PSI
25
50 7.25
75
100 14.5
125
150 21.75
175
200 29
Offset (TYP)
Figure 3. Output versus Pressure Differential
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PACKAGE DIMENSIONS
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CASE 1320-02 ISSUE B
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PACKAGE DIMENSIONS
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CASE 1320-02 ISSUE B
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PACKAGE DIMENSIONS
PIN 4
PIN 1
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CASE 1320A-02 ISSUE A
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PACKAGE DIMENSIONS
PAGE 2 OF 2
CASE 1320A-02 ISSUE A
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MPXM2202 Rev. 2 09/2005

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